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Turbo Molecular Pump HiPace Series

Industry-leading basic performance such as compression ratio, achieved vacuum level, and gas flow rate.

This is a gas transfer type mechanical vacuum pump used in applications requiring high vacuum (< 1x 10^-1 Pa), combined with roughing pumps such as rotary pumps. Since it does not use oil on the high vacuum side, a clean vacuum can be achieved. • Specifications can be selected according to the usage environment • Equipped with a drive circuit (models with built-in power supply are also available) Saves installation space, reduces cables, and lowers costs • Drive circuit disconnection type Flexibility in installation environment and space • Automatic recognition of accessories (plug & play) No need for troublesome wiring work • Worldwide service Service support available not only in Japan but also globally

  • Vacuum pump

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